- 《Russian Microelectronics》
- 语言：外文
- ISSN：1063-7397
- 核心刊：;Scopus;Ei Compendex(2018);
- 收录情况：Academic OneFile, Academic Search, Chemical Abstracts Service (CAS), Current Abs
- 学科分类：通信 控制科学
- 简介：Russian Microelectronics (Mikroelektronika) covers the physical, technological, and some VLSI and UL...
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- 简介：Russian Microelectronics (Mikroelektronika) covers the physical, technological, and some VLSI and ULSI circuit-technical aspects of microelectronics and nanoelectronics; it informs the reader of new trends in submicron optical, x-ray, electron, and ion-beam lithography technology, dry processing techniques, etching, doping, and deposition and planarization technology. Significant space is devoted to problems arising in the application of proton, electron, and ion beams, plasma, etc. Consideration is given to new equipment, including cluster tools and control in situ and submicron CMOS, bipolar, and BICMOS technologies. The journal presents papers addressing problems of molecular beam epitaxy and related processes, heterojunction devices and integrated circuits, the technology and devices of nanoelectronics, and the fabrication of nanometer scale devices, including new device structures, quantum-effect devices, and superconducting devices. The reader will find papers containing news of the diagnostics of surfaces and microelectronic structures, the modeling of technological processes and devices in micro- and nanoelectronics, includeng nanotransistors, and solid state realizations of qubits.The journal is intended for specialists at research institutes, universities, and other educational establishments; for graduate students; and, to a certain extent, for those working at industrial laboratories.
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- 出版地： Springer Science & Business Media B.V.;Van Godewijckstraat 30;Dordrecht 3311 GZ;Netherlands;
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- 来源数据库：
- 国家科技图书文献中心文献检索
- SpringerLink电子期刊及电子图书 (1997－，部分从创刊/首卷开始 多出版类)
- Kluwer电子期刊 (1997－)
- Ingenta Connect
- Ovid检索平台
