- 《IEEE Transactions on Semiconductor Manufacturing: A Publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council》
- 语言：外文
- ISSN：0894-6507
- 核心刊：;Ei Compendex(2018);
- 收录情况：Ei Compendex(2018)
- 周期：季刊
- 影响因子：2018:1.14;2017:1.336;
- 学科分类：通信 控制科学